Inventor
SHIRASU TATSUMI
JP5 patents
⚠️ This page may combine multiple inventors who share the name “SHIRASU TATSUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
4 patentsUS6043114AMar 28, 2000
Process for manufacturing a semiconductor wafer, a semiconductor wafer, process for manufacturing a semiconductor integrated circuit device, and semiconductor integrated circuit device
HITACHI LTD19 citations90
US4258465AMar 31, 1981
Method for fabrication of offset gate MIS device
HITACHI LTD23 citations81
US6630375B2Oct 7, 2003
Process for manufacturing a semiconductor wafer, a semiconductor wafer, process for manufacturing a semiconductor integrated circuit device, and semiconductor integrated circuit device
HITACHI LTD6 citations71
US6368905B1Apr 9, 2002
Process for manufacturing a semiconductor wafer, a semiconductor wafer, process for manufacturing a semiconductor integrated circuit device, and semiconductor integrated circuit device
HITACHI LTD9 citations71