Inventor
SUGINO YUJI
JP6 patents
⚠️ This page may combine multiple inventors who share the name “SUGINO YUJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
3 patentsUS6043114AMar 28, 2000
Process for manufacturing a semiconductor wafer, a semiconductor wafer, process for manufacturing a semiconductor integrated circuit device, and semiconductor integrated circuit device
HITACHI LTD19 citations90
US6630375B2Oct 7, 2003
Process for manufacturing a semiconductor wafer, a semiconductor wafer, process for manufacturing a semiconductor integrated circuit device, and semiconductor integrated circuit device
HITACHI LTD6 citations71
US6368905B1Apr 9, 2002
Process for manufacturing a semiconductor wafer, a semiconductor wafer, process for manufacturing a semiconductor integrated circuit device, and semiconductor integrated circuit device
HITACHI LTD9 citations71