Inventor
CHAM JOHNNY
SG2 patents
Patents
2 patentsUS6517235B2Feb 11, 2003
Using refractory metal silicidation phase transition temperature points to control and/or calibrate RTP low temperature operation
CHARTERED SEMICONDUCTOR MFG9 citations64
US6701199B1Mar 2, 2004
Methodology to obtain integrated process results prior to process tools being installed
CHARTERED SEMICONDUCTOR MFG0 citations25