Inventor
OOMORI TAKEO
JP20 patents
⚠️ This page may combine multiple inventors who share the name “OOMORI TAKEO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
17 patentsUS7298471B2Nov 20, 2007
Surface inspection apparatus and surface inspection method
NIKON CORP12 citations92
US6774987B2Aug 10, 2004
Surface inspection method, surface inspection apparatus, and recording medium and data signal for providing surface inspection program
NIKON CORP23 citations92
US6693293B2Feb 17, 2004
Surface inspection apparatus using radiation or light
NIKON CORP22 citations92
US6563577B2May 13, 2003
Defect testing apparatus and defect testing method
NIKON CORP19 citations92
US7692780B2Apr 6, 2010
Surface inspecting apparatus
NIKON CORP8 citations84
US7372557B2May 13, 2008
Surface defect inspection apparatus and surface defect inspection method
NIKON CORP9 citations84
US6646735B2Nov 11, 2003
Surface inspection apparatus and surface inspection method
NIKON CORP14 citations84
US7369224B2May 6, 2008
Surface inspection apparatus, surface inspection method and exposure system
NIKON CORP13 citations83
US7643137B2Jan 5, 2010
Defect inspection apparatus, defect inspection method and method of inspecting hole pattern
NIKON CORP15 citations82
US6512579B2Jan 28, 2003
Defect inspection apparatus
NIKON CORP9 citations74
US6654113B2Nov 25, 2003
Surface inspection apparatus
NIKON CORP10 citations73
US8687182B2Apr 1, 2014
Surface inspection apparatus and surface inspection method
NIKON CORP1 citations62
US7697139B2Apr 13, 2010
Surface inspection apparatus
NIKON CORP2 citations62
US7557912B2Jul 7, 2009
Defect inspection apparatus and defect inspection method
NIKON CORP4 citations62
US7307725B2Dec 11, 2007
Surface inspection apparatus, polarization illuminating device and light-receiving device
NIKON CORP6 citations58
US7990535B2Aug 2, 2011
Surface state detecting apparatus
NIKON CORP0 citations52
US7834993B2Nov 16, 2010
Surface inspection apparatus and surface inspection method
NIKON CORP0 citations52