Inventor

VULLINGS HENRICUS JOHANNES LOU

NL2 patents

⚠️ This page may combine multiple inventors who share the name “VULLINGS HENRICUS JOHANNES LOU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

1 patent

US7394520B2Jul 1, 2008

Temperature conditioned load lock, lithographic apparatus comprising such a load lock and method of manufacturing a substrate with such a load lock

ASML NETHERLANDS BV10 citations79

ASSEMBLEON BV

1 patent

US7360716B2Apr 22, 2008

Method of determining at least one marking element on a substrate

ASSEMBLEON BV0 citations36