Inventor
SAITOU TETSUYA
JP8 patents
⚠️ This page may combine multiple inventors who share the name “SAITOU TETSUYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
6 patentsUS9885114B2Feb 6, 2018
Film forming apparatus
TOKYO ELECTRON LTD2 citations69
US9441293B2Sep 13, 2016
Film-forming apparatus
TOKYO ELECTRON LTD3 citations68
US11664266B2May 30, 2023
Substrate processing apparatus and substrate delivery method
TOKYO ELECTRON LTD0 citations49
US11527404B2Dec 13, 2022
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations47
US11335542B2May 17, 2022
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations47
US11236423B2Feb 1, 2022
Film-forming apparatus
TOKYO ELECTRON LTD0 citations43