P

Inventor

SAKAKIBARA MAKOTO

JP37 patents
⚠️ This page may combine multiple inventors who share the name “SAKAKIBARA MAKOTO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI HIGH TECH CORP

22 patents
US7425714B2Sep 16, 2008

Measurement method of electron beam current, electron beam writing system and electron beam detector

HITACHI HIGH TECH CORP12 citations84
US11011348B2May 18, 2021

Scanning electron microscope and sample observation method using scanning electron microscope

HITACHI HIGH TECH CORP8 citations83
US11257658B2Feb 22, 2022

Charged particle beam apparatus

HITACHI HIGH TECH CORP3 citations73
US7423274B2Sep 9, 2008

Electron beam writing system and electron beam writing method

HITACHI HIGH TECH CORP7 citations73
US9520266B2Dec 13, 2016

Pattern critical dimension measurement equipment and method for measuring pattern critical dimension

HITACHI HIGH TECH CORP4 citations72
US12394586B2Aug 19, 2025

Charged particle beam device

HITACHI HIGH TECH CORP0 citations62
US12205790B2Jan 21, 2025

Charged particle beam device

HITACHI HIGH TECH CORP0 citations62
US12176181B2Dec 24, 2024

Pattern inspecting device

HITACHI HIGH TECH CORP1 citations62
US12125667B2Oct 22, 2024

Charged particle beam device

HITACHI HIGH TECH CORP0 citations62
US12057288B2Aug 6, 2024

Charged particle beam device and inspection method

HITACHI HIGH TECH CORP0 citations62
US11227740B2Jan 18, 2022

Electron gun and electron beam application device

HITACHI HIGH TECH CORP0 citations62
US11170969B2Nov 9, 2021

Electron beam observation device, electron beam observation system, and control method of electron beam observation device

HITACHI HIGH TECH CORP0 citations61
US11967482B2Apr 23, 2024

Charged particle beam device

HITACHI HIGH TECH CORP0 citations52
US9287082B2Mar 15, 2016

Charged particle beam apparatus

HITACHI HIGH TECH CORP0 citations52
US12196802B2Jan 14, 2025

Semiconductor inspection device and method for inspecting semiconductor sample

HITACHI HIGH TECH CORP0 citations51
US11791130B2Oct 17, 2023

Electron beam observation device, electron beam observation system, and image correcting method and method for calculating correction factor for image correction in electron beam observation device

HITACHI HIGH TECH CORP0 citations50
US11282671B2Mar 22, 2022

Charged-particle beam apparatus

HITACHI HIGH TECH CORP0 citations50
US12512294B2Dec 30, 2025

Charged particle beam device

HITACHI HIGH TECH CORP0 citations45
US10707047B2Jul 7, 2020

Measuring device and measuring method

HITACHI HIGH TECH CORP0 citations41
US10636618B2Apr 28, 2020

Charged particle beam apparatus

HITACHI HIGH TECH CORP0 citations41
US10217604B2Feb 26, 2019

Charged particle beam apparatus

HITACHI HIGH TECH CORP0 citations41
US10014160B2Jul 3, 2018

Scanning electron microscope and method for controlling same

HITACHI HIGH TECH CORP0 citations40

HITACHI LTD

6 patents

KAO CORP

4 patents

PIONEER ELECTRONIC CORP

1 patent

INOUE MTP KK

1 patent

YUKEN KOGYO CO LTD

1 patent

MOMENTIVE PERFORMANCE MAT JP

1 patent

DENSO CORP

1 patent