Inventor

WAKIYAMA SHIGERU

JP19 patents

⚠️ This page may combine multiple inventors who share the name “WAKIYAMA SHIGERU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

WAKIYAMA SHIGERU

SEIKO INSTR INC

Surface analyzing apparatus

Analyzing method and apparatus for minute foreign substances, and manufacturing methods for manufacturing semiconductor device and liquid crystal display device using the same

Method for analyzing minute foreign substance elements

Alignment assembly for aligning a spring element with a laser beam in a probe microscope

Surface analyzing apparatus with anti-vibration table

Probe microscope having error correction piezoelectric scanner

Surface analyzing apparatus

SII NANOTECHNOLOGY INC

Method of processing vertical cross-section using atomic force microscope

Processing method using probe of scanning probe microscope

Apparatus structure and scanning probe microscope including apparatus structure

Scanning probe microscope and scanning method

Processing probe

Method of removing particle of photomask using atomic force microscope

MITSUBISHI ELECTRIC CORP

Analyzing method and apparatus for minute foreign substances, and manufacturing methods for manufacturing semiconductor device and liquid crystal display device using the same

Method and apparatus for analyzing minute foreign substance, and process for semiconductor elements or liquid crystal elements by use thereof

AGENCY IND SCIENCE TECHN

Relative displacement control apparatus

Tunnel current detecting photo-acoustic spectrometer

WAKIYAMA SHIGERU

Probe aligning method for probe microscope and probe microscope operated by the same

HITACHI HIGH-TECH SCIENCE CORP

Actuator position calculation device, actuator position calculation method, and actuator position calculation program