Inventor
HAYAKAWA SHIGENORI
JP12 patents
⚠️ This page may combine multiple inventors who share the name “HAYAKAWA SHIGENORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LUMENTUM JAPAN INC
4 patentsUS11329450B2May 10, 2022
Electro-absorption optical modulator and manufacturing method thereof
LUMENTUM JAPAN INC5 citations72
US12136797B2Nov 5, 2024
Semiconductor optical device and optical transceiver module
LUMENTUM JAPAN INC0 citations60
US11133646B2Sep 28, 2021
Semiconductor optical device and optical transceiver module
LUMENTUM JAPAN INC1 citations60
US11462886B2Oct 4, 2022
Buried-type semiconductor optical device
LUMENTUM JAPAN INC0 citations50
SEMICONDUCTOR ENERGY LAB
3 patentsUS6833313B2Dec 21, 2004
Method of manufacturing semiconductor device by implanting rare gas ions
SEMICONDUCTOR ENERGY LAB17 citations90
US7772052B2Aug 10, 2010
Method of manufacturing semiconductor device
SEMICONDUCTOR ENERGY LAB0 citations50
US7615473B2Nov 10, 2009
Method of introducing ion and method of manufacturing semiconductor device
SEMICONDUCTOR ENERGY LAB0 citations39