P

Inventor

BAE JEONG-YONG

KR15 patents
⚠️ This page may combine multiple inventors who share the name “BAE JEONG-YONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SEMES CO LTD

3 patents
US7323080B2Jan 29, 2008

Apparatus for treating substrate

SEMES CO LTD32 citations89
US7617836B2Nov 17, 2009

System and method for supplying functional water

SEMES CO LTD10 citations79
US7154611B2Dec 26, 2006

Spin etcher with thickness measuring system

SEMES CO LTD1 citations44

DNS KOREA CO LTD

2 patents
US6784106B2Aug 31, 2004

Wafer drying method

DNS KOREA CO LTD9 citations69
US6918406B2Jul 19, 2005

Chemical supply apparatus

DNS KOREA CO LTD7 citations68

SAMSUNG ELECTRONICS CO LTD

2 patents
US11361960B2Jun 14, 2022

Substrate processing apparatus and substrate processing system including the same

SAMSUNG ELECTRONICS CO LTD0 citations61
US10707071B2Jul 7, 2020

Substrate processing apparatus and substrate processing system including the same

SAMSUNG ELECTRONICS CO LTD0 citations51

LG ELECTRONICS INC

1 patent
US5873261AFeb 23, 1999

Accumulator for rotary compressor

LG ELECTRONICS INC17 citations83

LEE TAEK YOUB

1 patent
US8714169B2May 6, 2014

Spin head, apparatus for treating substrate, and method for treating substrate

LEE TAEK YOUB8 citations80

JEONG YOUNG-JU

1 patent
US8793898B2Aug 5, 2014

Apparatus and method for drying substrates

JEONG YOUNG-JU17 citations78

PARK SUN YONG

1 patent
US8702365B2Apr 22, 2014

Substrate processing apparatus and method for transferring substrate for the apparatus

PARK SUN YONG9 citations76

DNS KOREA LTD

1 patent
US6757989B2Jul 6, 2004

Wafer drying apparatus

DNS KOREA LTD7 citations65

RHO EUN-SU

1 patent
US9529267B2Dec 27, 2016

Method for processing a substrate and apparatus for performing the same

RHO EUN-SU6 citations61

LEE WOO-SEOK

1 patent
US8257549B2Sep 4, 2012

Spin head, chuck pin used in the spin head, and method for treating a substrate with the spin head

LEE WOO-SEOK0 citations51

KIM YIJUNG

1 patent
US8540854B2Sep 24, 2013

Apparatus and method for plating substrate

KIM YIJUNG0 citations30