Inventor
BOEDT FRANCOIS
FR6 patents
Patents
6 patentsUS7939427B2May 10, 2011
Process for fabricating a substrate of the silicon-on-insulator type with reduced roughness and uniform thickness
SOITEC SILICON ON INSULATOR2 citations60
US9190284B2Nov 17, 2015
Process for treating a semiconductor-on-insulator structure for improving thickness uniformity of the semiconductor layer
SOITEC SILICON ON INSULATOR1 citations49
US9799549B2Oct 24, 2017
Process for manufacturing a composite structure
SOITEC SILICON ON INSULATOR1 citations45
US9911641B2Mar 6, 2018
Process for manufacturing a semiconductor substrate, and semiconductor substrate obtained
SOITEC SILICON ON INSULATOR1 citations41
US9082819B2Jul 14, 2015
Process for thinning the active silicon layer of a substrate of “silicon on insulator” (SOI) type
SOITEC SILICON ON INSULATOR0 citations39
US9768057B2Sep 19, 2017
Method for transferring a layer from a single-crystal substrate
SOITEC SILICON ON INSULATOR0 citations35