Inventor
FERBER JOERG
US7 patents
⚠️ This page may combine multiple inventors who share the name “FERBER JOERG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
COHERENT INC
3 patentsUS7615722B2Nov 10, 2009
Amorphous silicon crystallization using combined beams from optically pumped semiconductor lasers
COHERENT INC20 citations83
US7428039B2Sep 23, 2008
Method and apparatus for providing uniform illumination of a mask in laser projection systems
COHERENT INC14 citations81
US7331676B2Feb 19, 2008
Apparatus for projecting a reduced image of a photomask using a schwarzschild objective
COHERENT INC7 citations72