P

Inventor

HIRATA HIRONOBU

JP9 patents
⚠️ This page may combine multiple inventors who share the name “HIRATA HIRONOBU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SUZUKI KUNIHIKO

3 patents
US8597429B2Dec 3, 2013

Manufacturing apparatus and method for semiconductor device

SUZUKI KUNIHIKO2 citations61
US8257499B2Sep 4, 2012

Vapor phase deposition apparatus and vapor phase deposition method

SUZUKI KUNIHIKO1 citations51
US9090990B2Jul 28, 2015

Manufacturing apparatus and method for semiconductor device

SUZUKI KUNIHIKO0 citations40

NUFLARE TECHNOLOGY INC

2 patents
US7699604B2Apr 20, 2010

Manufacturing apparatus for semiconductor device and manufacturing method for semiconductor device

NUFLARE TECHNOLOGY INC5 citations62
US9552983B2Jan 24, 2017

Manufacturing method for semiconductor device

NUFLARE TECHNOLOGY INC1 citations49

TOSHIBA MACHINE CO LTD

1 patent
US5984764ANov 16, 1999

Method of dressing an abrasive cloth and apparatus therefor

TOSHIBA MACHINE CO LTD30 citations91

HIRATA HIRONOBU

1 patent
US8460470B2Jun 11, 2013

Vapor phase deposition apparatus and support table

HIRATA HIRONOBU6 citations61

MORIYAMA YOSHIKAZU

1 patent
US8632634B2Jan 21, 2014

Coating apparatus and coating method

MORIYAMA YOSHIKAZU3 citations57

HIGASHI SHINYA

1 patent
US8795435B2Aug 5, 2014

Susceptor, coating apparatus and coating method using the susceptor

HIGASHI SHINYA0 citations36