Inventor

BORK INGO

US12 patents

⚠️ This page may combine multiple inventors who share the name “BORK INGO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

D2S INC

9 patents

US9043734B2May 26, 2015

Method and system for forming high accuracy patterns using charged particle beam lithography

D2S INC13 citations92

US8719739B2May 6, 2014

Method and system for forming patterns using charged particle beam lithography

D2S INC22 citations90

US9400857B2Jul 26, 2016

Method and system for forming patterns using charged particle beam lithography

D2S INC5 citations81

US9612530B2Apr 4, 2017

Method and system for design of enhanced edge slope patterns for charged particle beam lithography

D2S INC4 citations72

US10031413B2Jul 24, 2018

Method and system for forming patterns using charged particle beam lithography

D2S INC3 citations70

US9034542B2May 19, 2015

Method and system for forming patterns with charged particle beam lithography

D2S INC3 citations62

US9164372B2Oct 20, 2015

Method and system for forming non-manhattan patterns using variable shaped beam lithography

D2S INC0 citations52

US9091946B2Jul 28, 2015

Method and system for forming non-manhattan patterns using variable shaped beam lithography

D2S INC1 citations52

US9465297B2Oct 11, 2016

Method and system for forming patterns with charged particle beam lithography

D2S INC0 citations51

FUJIMURA AKIRA

3 patents

US8473875B2Jun 25, 2013

Method and system for forming high accuracy patterns using charged particle beam lithography

FUJIMURA AKIRA39 citations97

US9057956B2Jun 16, 2015

Method and system for design of enhanced edge slope patterns for charged particle beam lithography

FUJIMURA AKIRA9 citations83

US8703389B2Apr 22, 2014

Method and system for forming patterns with charged particle beam lithography

FUJIMURA AKIRA1 citations51