Inventor
SEVERSON BRIAN
US11 patents
⚠️ This page may combine multiple inventors who share the name “SEVERSON BRIAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOVELLUS SYSTEMS INC
5 patentsUS8371567B2Feb 12, 2013
Pedestal covers
NOVELLUS SYSTEMS INC29 citations90
US7402098B2Jul 22, 2008
Carrier head for workpiece planarization/polishing
NOVELLUS SYSTEMS INC31 citations90
US7632170B2Dec 15, 2009
CMP apparatuses with polishing assemblies that provide for the passive removal of slurry
NOVELLUS SYSTEMS INC9 citations80
US7229339B2Jun 12, 2007
CMP apparatus and method
NOVELLUS SYSTEMS INC12 citations77
US7335092B1Feb 26, 2008
Carrier head for workpiece planarization/polishing
NOVELLUS SYSTEMS INC7 citations71