Inventor

SAUERHOEFER ALEXANDER

DE5 patents

⚠️ This page may combine multiple inventors who share the name “SAUERHOEFER ALEXANDER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

EVA ERIC

2 patents

US8891172B2Nov 18, 2014

Optical element and method

EVA ERIC7 citations81

US8508854B2Aug 13, 2013

Optical element and method

EVA ERIC12 citations81

HAUF MARKUS

1 patent

US8325322B2Dec 4, 2012

Optical correction device

HAUF MARKUS16 citations81

ZEISS CARL SMT GMBH

1 patent

US9639007B2May 2, 2017

Optical arrangement in an optical system, in particular in a microlithographic projection exposure apparatus

ZEISS CARL SMT GMBH0 citations49

LAUFER TIMO

1 patent

US9134504B2Sep 15, 2015

Optical arrangement in an optical system, in particular in a microlithographic projection exposure apparatus

LAUFER TIMO1 citations43