Inventor
MAIDA SHIGERU
JP19 patents
⚠️ This page may combine multiple inventors who share the name “MAIDA SHIGERU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHINETSU CHEMICAL CO
13 patentsUS7935648B2May 3, 2011
Titania-doped quartz glass for nanoimprint molds
SHINETSU CHEMICAL CO13 citations83
US7585598B2Sep 8, 2009
Titania-doped quartz glass and making method, EUV lithographic member and photomask substrate
SHINETSU CHEMICAL CO11 citations83
US9278881B2Mar 8, 2016
EUV lithography member, making method, and titania-doped quartz glass
SHINETSU CHEMICAL CO3 citations71
US9056785B2Jun 16, 2015
Nanoimprint mold-forming synthetic quartz glass and making method
SHINETSU CHEMICAL CO3 citations62
US8377612B2Feb 19, 2013
Titania-doped quartz glass member and making method
SHINETSU CHEMICAL CO3 citations62
US7923394B2Apr 12, 2011
Titania-doped quartz glass for nanoimprint molds
SHINETSU CHEMICAL CO4 citations62
US7159418B2Jan 9, 2007
Method of producing synthetic quartz glass
SHINETSU CHEMICAL CO4 citations62
US6990836B2Jan 31, 2006
Method of producing fluorine-containing synthetic quartz glass
SHINETSU CHEMICAL CO6 citations62
US10114280B2Oct 30, 2018
Titania-doped quartz glass and making method
SHINETSU CHEMICAL CO0 citations51
US9746773B2Aug 29, 2017
Titania-doped quartz glass and making method
SHINETSU CHEMICAL CO1 citations51
US9612525B2Apr 4, 2017
Titania-doped quartz glass and making method
SHINETSU CHEMICAL CO0 citations51
US8629071B2Jan 14, 2014
Titania and sulfur co-doped quartz glass member and making method
SHINETSU CHEMICAL CO1 citations51
US7849711B2Dec 14, 2010
Titania-doped quartz glass and making method, EUV lithographic member and photomask substrate
SHINETSU CHEMICAL CO0 citations51
MAIDA SHIGERU
6 patentsUS8105734B2Jan 31, 2012
Titania-doped quartz glass member and making method
MAIDA SHIGERU12 citations82
US8820122B2Sep 2, 2014
Titania-doped quartz glass and making method
MAIDA SHIGERU6 citations70
US9346700B2May 24, 2016
Titania-doped quartz glass and making method
MAIDA SHIGERU2 citations61
US8539797B2Sep 24, 2013
Titania and sulfur co-doped quartz glass member and making method
MAIDA SHIGERU0 citations51
US9296636B2Mar 29, 2016
Titania doped quartz glass and making method
MAIDA SHIGERU0 citations50
US9067814B2Jun 30, 2015
Method of producing synthetic quartz glass for excimer laser
MAIDA SHIGERU0 citations40