Inventor

OTSUKA HISATOSHI

JP29 patents

⚠️ This page may combine multiple inventors who share the name “OTSUKA HISATOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

OTSUKA HISATOSHI

SHINETSU CHEMICAL CO

Synthetic quartz glass substrate for photomask and making method

Titania-doped quartz glass for nanoimprint molds

Synthetic fused silica member

Synthetic quartz glass and production process

Synthetic quartz glass member for excimer laser and method of making

Synthetic quartz glass manufacturing process

EUV lithography member, making method, and titania-doped quartz glass

Nanoimprint mold-forming synthetic quartz glass and making method

Titania-doped quartz glass member and making method

Titania-doped quartz glass for nanoimprint molds

Synthetic quartz glass ingot, synthetic quartz glass, and methods of manufacture thereof

Method of producing synthetic quartz glass

Method of producing fluorine-containing synthetic quartz glass

Synthetic quartz glass substrate for excimer lasers and making method

Synthetic quartz glass blank

Titania-doped quartz glass and making method

Titania-doped quartz glass and making method

Titania-doped quartz glass and making method

Titania and sulfur co-doped quartz glass member and making method

Synthetic quartz glass substrate for excimer lasers and making method

MAIDA SHIGERU

Titania-doped quartz glass member and making method

Titania-doped quartz glass and making method

Titania-doped quartz glass and making method

Titania and sulfur co-doped quartz glass member and making method

Titania doped quartz glass and making method

Method of producing synthetic quartz glass for excimer laser

OTSUKA HISATOSHI

Burner and method for the manufacture of synthetic quartz glass

Manufacture of synthetic quartz glass ingot and synthetic quartz glass member

SHINETSU QUARTZ PROD

Production method for making an optical member for excimer laser using synthetic quartz glass