Inventor
PATALAY KAILASH KIRAN
US15 patents
⚠️ This page may combine multiple inventors who share the name “PATALAY KAILASH KIRAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
8 patentsUS7976634B2Jul 12, 2011
Independent radiant gas preheating for precursor disassociation control and gas reaction kinetics in low temperature CVD systems
APPLIED MATERIALS INC18 citations89
US7964038B2Jun 21, 2011
Apparatus for improved azimuthal thermal uniformity of a substrate
APPLIED MATERIALS INC18 citations79
US9768043B2Sep 19, 2017
Quartz upper and lower domes
APPLIED MATERIALS INC4 citations72
US9832816B2Nov 28, 2017
Absorbing reflector for semiconductor processing chamber
APPLIED MATERIALS INC2 citations69
US8747560B2Jun 10, 2014
System and method for pedestal adjustment
APPLIED MATERIALS INC2 citations60
US10345155B2Jul 9, 2019
Model based lamp background filtration of stray radiation for pyrometry
APPLIED MATERIALS INC0 citations52
US9739666B2Aug 22, 2017
Model based lamp background filtration of stray radiation for pyrometry
APPLIED MATERIALS INC0 citations52
US10306708B2May 28, 2019
Absorbing reflector for semiconductor processing chamber
APPLIED MATERIALS INC0 citations48
PATALAY KAILASH KIRAN
4 patentsUS8441640B2May 14, 2013
Non-contact substrate support position sensing system and corresponding adjustments
PATALAY KAILASH KIRAN19 citations91
US8147137B2Apr 3, 2012
Pyrometry for substrate processing
PATALAY KAILASH KIRAN12 citations83
US8951351B2Feb 10, 2015
Wafer processing hardware for epitaxial deposition with reduced backside deposition and defects
PATALAY KAILASH KIRAN5 citations69
US8967860B2Mar 3, 2015
Low temperature measurement and control using low temperature pyrometry
PATALAY KAILASH KIRAN2 citations61