Inventor

LU YUNJUN

CN9 patents

Patents

9 patents

US11009336B2May 18, 2021

Method for wavefront measurement of optical imaging system based on grating shearing interferometry

SHANGHAI INST OPTICS & FINE MECH CAS3 citations71

US11029611B2Jun 8, 2021

Device and method for detecting projection objective wave-front aberration

SHANGHAI INST OPTICS & FINE MECH CAS2 citations70

US11604418B2Mar 14, 2023

Multi-channel device and method for measuring distortion and magnification of objective lens

SHANGHAI INST OPTICS & FINE MECH CAS2 citations69

US9658114B1May 23, 2017

Device for measuring point diffraction interferometric wavefront aberration and method for detecting wave aberration

SHANGHAI INST OPTICS & FINE MECH CAS5 citations68

US10969274B2Apr 6, 2021

Method for detecting wavefront aberration for optical imaging system based on grating shearing interferometer

SHANGHAI INST OPTICS & FINE MECH CAS1 citations60

US11215512B2Jan 4, 2022

Light intensity fluctuation-insensitive projection objective wave aberration detection device and detection method thereof

SHANGHAI INST OPTICS & FINE MECH CAS1 citations59

US11561082B2Jan 24, 2023

Method for compensation during the process of wavefront reconstruction in grating-based lateral shearing interferometry

SHANGHAI INST OPTICS & FINE MECH CAS0 citations51

US11340118B2May 24, 2022

Method for high-accuracy wavefront measurement base on grating shearing interferometry

SHANGHAI INST OPTICS & FINE MECH CAS0 citations50

US11668625B2Jun 6, 2023

Apparatus and method for detecting wavefront aberration of objective lens

SHANGHAI INST OPTICS & FINE MECH CAS0 citations46