Inventor
PENG CHANGZHE
CN3 patents
Patents
3 patentsUS11029611B2Jun 8, 2021
Device and method for detecting projection objective wave-front aberration
SHANGHAI INST OPTICS & FINE MECH CAS2 citations70
US11215512B2Jan 4, 2022
Light intensity fluctuation-insensitive projection objective wave aberration detection device and detection method thereof
SHANGHAI INST OPTICS & FINE MECH CAS1 citations59
US11668625B2Jun 6, 2023
Apparatus and method for detecting wavefront aberration of objective lens
SHANGHAI INST OPTICS & FINE MECH CAS0 citations46