Inventor

TAS ROBERT D

US7 patents

⚠️ This page may combine multiple inventors who share the name “TAS ROBERT D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

3 patents

US7845308B1Dec 7, 2010

Systems incorporating microwave heaters within fluid supply lines of substrate processing chambers and methods for use of such systems

LAM RES CORP11 citations81

US7972652B2Jul 5, 2011

Electroless plating system

LAM RES CORP1 citations49

US7913644B2Mar 29, 2011

Electroless deposition system

LAM RES CORP1 citations48

NOVELLUS SYSTEMS INC

1 patent

US6794290B1Sep 21, 2004

Method of chemical modification of structure topography

NOVELLUS SYSTEMS INC315 citations98

NOVELLUS SYSTEMS

1 patent

US6846391B1Jan 25, 2005

Process for depositing F-doped silica glass in high aspect ratio structures

NOVELLUS SYSTEMS33 citations91

KLA CORP

1 patent

US11668601B2Jun 6, 2023

Instrumented substrate apparatus

KLA CORP0 citations61

IVANOV IGOR

1 patent

US8622017B2Jan 7, 2014

Electroless plating system

IVANOV IGOR0 citations42