Inventor

JENSEN EARL

US20 patents

⚠️ This page may combine multiple inventors who share the name “JENSEN EARL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

JENSEN EARL

KLA TENCOR CORP

Encapsulated instrumented substrate apparatus for acquiring measurement parameters in high temperature process applications

Method and system for measuring radiation and temperature exposure of wafers along a fabrication process line

Position sensitive substrate device

Method and system for measuring heat flux

In-situ temperature sensing substrate, system, and method

Process condition sensing device and method for plasma chamber

Method and system for measuring radiation and temperature exposure of wafers along a fabrication process line

Encapsulated instrumented substrate apparatus for acquiring measurement parameters in high temperature process applications

Thickness change monitor wafer for in situ film thickness monitoring

JENSEN EARL

Automated interface apparatus and method for use in semiconductor wafer handling systems

Process condition sensing device and method for plasma chamber

Film thickness monitor

Defect inspection apparatus, system, and method

Wafer level spectrometer

SENSARRAY CORP

Integrated process condition sensing wafer and data analysis system

Integrated process condition sensing wafer and data analysis system

SUN MEI

High temperature sensor wafer for in-situ measurements in active plasma

Process condition measuring device (PCMD) and method for measuring process conditions in a workpiece processing tool configured to process production workpieces

KLA CORP

Instrumented substrate apparatus

Sensor configuration for process condition measuring devices