Inventor
SHI XU
SG28 patents
⚠️ This page may combine multiple inventors who share the name “SHI XU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FILPLAS VACUUM TECHNOLOGY PTE
8 patentsUS6319369B1Nov 20, 2001
Ignition means for a cathodic arc source
FILPLAS VACUUM TECHNOLOGY PTE44 citations94
US6511585B1Jan 28, 2003
Enhanced macroparticle filter and cathode arc source
FILPLAS VACUUM TECHNOLOGY PTE33 citations92
US6413387B1Jul 2, 2002
Cathode arc source for metallic and dielectric coatings
FILPLAS VACUUM TECHNOLOGY PTE47 citations92
US7014738B2Mar 21, 2006
Enhanced macroparticle filter and cathode arc source
FILPLAS VACUUM TECHNOLOGY PTE16 citations83
US6262539B1Jul 17, 2001
Cathode arc source with target feeding apparatus
FILPLAS VACUUM TECHNOLOGY PTE18 citations83
US6761805B1Jul 13, 2004
Cathode arc source with magnetic field generating means positioned above and below the cathode
FILPLAS VACUUM TECHNOLOGY PTE14 citations82
US6736949B2May 18, 2004
Filtered cathode arc source deposition apparatus
FILPLAS VACUUM TECHNOLOGY PTE7 citations72
US6338779B1Jan 15, 2002
Arc monitoring
FILPLAS VACUUM TECHNOLOGY PTE9 citations68
NANOFILM TECH INTERNATIONAL LIMITED
6 patentsUS11643733B2May 9, 2023
ta-C based coatings with improved hardness
NANOFILM TECH INTERNATIONAL LIMITED2 citations71
US12123088B2Oct 22, 2024
Temperature resistant carbon coatings
NANOFILM TECH INTERNATIONAL LIMITED0 citations61
US11898257B1Feb 13, 2024
Carbon coated electrodes
NANOFILM TECH INTERNATIONAL LIMITED0 citations61
US11855308B2Dec 26, 2023
Carbon coated hydrogen fuel cell bipolar plates
NANOFILM TECH INTERNATIONAL LIMITED0 citations61
US11926890B2Mar 12, 2024
Cathode arc source
NANOFILM TECH INTERNATIONAL LIMITED0 citations50
US11903116B2Feb 13, 2024
Cathode arc source, filters thereof and method of filtering macroparticles
NANOFILM TECH INTERNATIONAL LIMITED0 citations50
UNIV NANYANG
4 patentsBOE TECHNOLOGY GROUP CO LTD
3 patentsUS10087015B2Oct 2, 2018
Roller assembly and transmission device
BOE TECHNOLOGY GROUP CO LTD3 citations69
US10120215B2Nov 6, 2018
Apparatus for carrying substrate by off-line vacuum suction and method for transporting substrate
BOE TECHNOLOGY GROUP CO LTD1 citations49
US10138547B2Nov 27, 2018
Substrate carrying apparatus and sputtering device comprising the same
BOE TECHNOLOGY GROUP CO LTD0 citations42