Inventor
PAREEK YOGITA
US7 patents
Patents
7 patentsUS9903020B2Feb 27, 2018
Generation of compact alumina passivation layers on aluminum plasma equipment components
APPLIED MATERIALS INC108 citations96
US10941303B2Mar 9, 2021
Chemical conversion of yttria into yttrium fluoride and yttrium oxyfluoride to develop pre-seasoned corossion resistive coating for plasma components
APPLIED MATERIALS INC4 citations71
US10886137B2Jan 5, 2021
Selective nitride removal
APPLIED MATERIALS INC0 citations61
US10233554B2Mar 19, 2019
Aluminum electroplating and oxide formation as barrier layer for aluminum semiconductor process equipment
APPLIED MATERIALS INC1 citations59
US11118263B2Sep 14, 2021
Method for forming a protective coating film for halide plasma resistance
APPLIED MATERIALS INC0 citations53
US11976357B2May 7, 2024
Methods for forming a protective coating on processing chamber surfaces or components
APPLIED MATERIALS INC0 citations50
US10253406B2Apr 9, 2019
Method for forming yttrium oxide on semiconductor processing equipment
APPLIED MATERIALS INC0 citations49