Inventor
LIAO CHUN-CHENG
TW11 patents
Patents
11 patentsUS10720509B1Jul 21, 2020
Method for preparing a semiconductor device structure with an annular semiconductor fin
NANYA TECHNOLOGY CORP14 citations83
US7014965B2Mar 21, 2006
Photolithography method for reducing effects of lens aberration
NANYA TECHNOLOGY CORP16 citations82
US12112978B2Oct 8, 2024
Method for fabricating semiconductor device with redistribution plugs
NANYA TECHNOLOGY CORP2 citations70
US11282790B1Mar 22, 2022
Semiconductor device with composite landing pad for metal plug
NANYA TECHNOLOGY CORP3 citations70
US12288748B2Apr 29, 2025
Semiconductor device structure with silicide portion between conductive plugs
NANYA TECHNOLOGY CORP0 citations60
US11587934B2Feb 21, 2023
Method for preparing semiconductor memory device with air gaps between conductive features
NANYA TECHNOLOGY CORP0 citations60
US11587876B2Feb 21, 2023
Method for preparing semiconductor device with composite landing pad
NANYA TECHNOLOGY CORP0 citations60
US11264390B2Mar 1, 2022
Semiconductor memory device with air gaps between conductive features and method for preparing the same
NANYA TECHNOLOGY CORP0 citations60
US11063050B2Jul 13, 2021
Semiconductor device with air gaps and method for fabricating the same
NANYA TECHNOLOGY CORP0 citations60
US12315793B2May 27, 2025
Semiconductor device with redistribution plugs
NANYA TECHNOLOGY CORP0 citations49
US12080598B2Sep 3, 2024
Method for preparing semiconductor device structure with silicide portion between conductive plugs
NANYA TECHNOLOGY CORP0 citations49