Inventor
YANG HYO WON
KR8 patents
Patents
8 patentsUS12381084B2Aug 5, 2025
Apparatus and method for treating substrate
SEMES CO LTD0 citations61
US12366799B2Jul 22, 2025
Apparatus for correcting photomask and method thereof
SEMES CO LTD0 citations61
US12460863B2Nov 4, 2025
Apparatus for treating a substrate
SEMES CO LTD0 citations58
US12591175B2Mar 31, 2026
Substrate treating apparatus and substrate treating method
SEMES CO LTD0 citations49
US12517440B2Jan 6, 2026
Irradiating module, and substrate treating apparatus including the same
SEMES CO LTD0 citations49
US12504690B2Dec 23, 2025
Apparatus for treating substrate and method for treating a substrate
SEMES CO LTD0 citations47
US12494382B2Dec 9, 2025
Method and apparatus for treating substrate
SEMES CO LTD0 citations47
US12131918B2Oct 29, 2024
Substrate processing apparatus
SEMES CO LTD0 citations47