Inventor
TAKEBAYASHI MOTONARI
JP11 patents
⚠️ This page may combine multiple inventors who share the name “TAKEBAYASHI MOTONARI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI INT ELECTRIC INC
7 patentsUS7861668B2Jan 4, 2011
Batch-type remote plasma processing apparatus
HITACHI INT ELECTRIC INC19 citations92
US8028652B2Oct 4, 2011
Batch-type remote plasma processing apparatus
HITACHI INT ELECTRIC INC7 citations83
US8020514B2Sep 20, 2011
Batch-type remote plasma processing apparatus
HITACHI INT ELECTRIC INC9 citations83
US9039912B2May 26, 2015
Batch-type remote plasma processing apparatus
HITACHI INT ELECTRIC INC3 citations62
US10604839B2Mar 31, 2020
Substrate processing apparatus, method of manufacturing semiconductor device, and method of processing substrate
HITACHI INT ELECTRIC INC1 citations61
US7958842B2Jun 14, 2011
Substrate processing apparatus
HITACHI INT ELECTRIC INC2 citations60
US9373499B2Jun 21, 2016
Batch-type remote plasma processing apparatus
HITACHI INT ELECTRIC INC0 citations51