Inventor

BANTU NAGESHWER R

US3 patents

Patents

3 patents

US5609989AMar 11, 1997

Acid scavengers for use in chemically amplified photoresists

IBM47 citations94

US5268260ADec 7, 1993

Photoresist develop and strip solvent compositions and method for their use

IBM102 citations93

US5281723AJan 25, 1994

Propylene carbonate recovery process

IBM8 citations71