Inventor

GOTO HARUHIRO H

JP5 patents

⚠️ This page may combine multiple inventors who share the name “GOTO HARUHIRO H”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

2 patents

US6451390B1Sep 17, 2002

Deposition of TEOS oxide using pulsed RF plasma

APPLIED MATERIALS INC27 citations92

US7105100B2Sep 12, 2006

System and method for gas distribution in a dry etch process

APPLIED MATERIALS INC5 citations60

CANON KK

1 patent

US5316645AMay 31, 1994

Plasma processing apparatus

CANON KK39 citations92

NOVELLUS SYSTEMS INC

1 patent

US7740768B1Jun 22, 2010

Simultaneous front side ash and backside clean

NOVELLUS SYSTEMS INC20 citations91

APPLIED KOMATSU TECHNOLOGY INC

1 patent

US5980686ANov 9, 1999

System and method for gas distribution in a dry etch process

APPLIED KOMATSU TECHNOLOGY INC22 citations90