Inventor
SHIMA HIROMI
JP12 patents
⚠️ This page may combine multiple inventors who share the name “SHIMA HIROMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
7 patentsUS9640448B2May 2, 2017
Film forming method, film forming apparatus, and storage medium
TOKYO ELECTRON LTD463 citations96
US10964530B2Mar 30, 2021
Method of forming blocking silicon oxide film, and storage medium
TOKYO ELECTRON LTD1 citations60
US10553686B2Feb 4, 2020
Method and apparatus for forming silicon oxide film, and storage medium
TOKYO ELECTRON LTD1 citations59
US9422624B2Aug 23, 2016
Heat treatment method
TOKYO ELECTRON LTD0 citations50
US10781515B2Sep 22, 2020
Film-forming method and film-forming apparatus
TOKYO ELECTRON LTD0 citations49
US10968515B2Apr 6, 2021
Vertical heat treatment apparatus
TOKYO ELECTRON LTD0 citations46
US9758867B2Sep 12, 2017
Method of controlling gas supply apparatus and substrate processing system
TOKYO ELECTRON LTD0 citations39
OMRON TATEISI ELECTRONICS CO
4 patentsUS7307499B2Dec 11, 2007
High-frequency relay
OMRON TATEISI ELECTRONICS CO11 citations82
US9748065B2Aug 29, 2017
Sealed contact device
OMRON TATEISI ELECTRONICS CO4 citations72
US6781489B2Aug 24, 2004
High-frequency relay
OMRON TATEISI ELECTRONICS CO5 citations61
US9552948B2Jan 24, 2017
Sealed contact device and method of manufacturing the same
OMRON TATEISI ELECTRONICS CO0 citations51