Inventor

YOSHII MINORU

JP57 patents

⚠️ This page may combine multiple inventors who share the name “YOSHII MINORU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

YOSHII MINORU

CANON KK

Displacement detecting system, an expose apparatus, and a device manufacturing method employing a scale whose displacement is detected by a selected detection head

Inspection method and apparatus for inspecting a particle, if any, on a substrate having a pattern

Inspection system and device manufacturing method using the same

Two scanning probes information recording/reproducing system with one probe to detect atomic reference location on a recording medium

Apparatus and method of detecting positional relationship using a weighted coefficient

Alignment method and exposure apparatus using the same

Surface position detecting system and device manufacturing method using the same

Movement detection device and focus detection apparatus using such device

Encoder for controlling measurements in the range of a few angstroms

Measuring method and apparatus for meausring the positional relationship of first and second gratings

Device for detecting positional relationship between two objects

Focus detecting apparatus independent of object image contrast

Image stabilizing device

Anti-vibration imaging device

Position detecting system and exposure apparatus using the same

Exposure apparatus

Position sensor having a reflective projecting system and device fabrication method using the sensor

Surface position detecting system and exposure apparatus using the same

Optical inspection method and apparatus including intensity modulation of a light beam and detection of light scattered at an inspection position

Surface position detecting system and projection exposure apparatus using the same

Exposure state detecting system and exposure apparatus using the same

Best focus determining method

Positional deviation measuring device and method for measuring the positional deviation between a plurality of diffraction gratings formed on the same object

Apparatus and method for detecting a relative displacement between first and second diffraction gratings arranged close to each other wherein said gratings have different pitch sizes

Measuring apparatus utilizing diffraction of reflected and transmitted light

Movement detection device and focus detection apparatus using such device

Phase shift device and laser apparatus utilizing the same

Inspection apparatus for detecting foreign matter on a surface to be inspected, and an exposure apparatus and a device manufacturing method using the same

Optical heterodyne interference measuring apparatus and method, and exposing apparatus and device manufacturing method using the same, in which a phase difference between beat signals is detected

In-focus detecting device

Position detector for detecting the position of an object using a diffraction grating positioned at an angle

Measuring method and measuring apparatus

Position detecting method and apparatus

Distance measuring system

Exposure apparatus and device manufacturing method

Inspection system for original with pellicle

Aberration measuring method

Phase shift measuring apparatus utilizing optical meterodyne techniques

Phase measurement apparatus for measuring characterization of optical thin films

Apparatus for detecting foreign matter on a substrate, and an exposure apparatus including the same

Image recognition method

Measuring method and measuring apparatus for determining the relative displacement of a diffraction grating with respect to a plurality of beams

Method and apparatus for measuring an interval between two objects

Position detecting method and apparatus including Fraunhofer diffraction detector

Position detecting method and apparatus

Position detecting system utilizing a weight coefficient to determine a gravity center of light

In-focus detecting device

Distance measuring system utilizing an object with at least one inclined surface

Displacement detection apparatus

OMRON TATEISI ELECTRONICS CO

Door switches