Inventor
NOSE NORIYUKI
JP53 patents
Patents
50 patentsUS5486919AJan 23, 1996
Inspection method and apparatus for inspecting a particle, if any, on a substrate having a pattern
CANON KK155 citations99
US5767962AJun 16, 1998
Inspection system and device manufacturing method using the same
CANON KK102 citations98
US5465148ANov 7, 1995
Apparatus and method for detecting the relative positional deviation between two diffraction gratings
CANON KK59 citations96
US5333050AJul 26, 1994
Measuring method and apparatus for meausring the positional relationship of first and second gratings
CANON KK71 citations96
US5327221AJul 5, 1994
Device for detecting positional relationship between two objects
CANON KK99 citations96
US5182615AJan 26, 1993
Exposure apparatus
CANON KK79 citations96
US5142156AAug 25, 1992
Alignment method for printing a pattern of an original onto different surface areas of a substrate
CANON KK63 citations96
US4985186AJan 15, 1991
Process for producing optical element
CANON KK102 citations96
US4802746AFeb 7, 1989
Variable-focus optical element and focus detecting device utilizing the same
CANON KK87 citations96
US5148037ASep 15, 1992
Position detecting method and apparatus
CANON KK115 citations95
US6018395AJan 25, 2000
Alignment system
CANON KK26 citations93
US5861952AJan 19, 1999
Optical inspection method and apparatus including intensity modulation of a light beam and detection of light scattered at an inspection position
CANON KK37 citations93
US5751426AMay 12, 1998
Positional deviation measuring device and method for measuring the positional deviation between a plurality of diffraction gratings formed on the same object
CANON KK37 citations93
US5610718AMar 11, 1997
Apparatus and method for detecting a relative displacement between first and second diffraction gratings arranged close to each other wherein said gratings have different pitch sizes
CANON KK40 citations93
US5593800AJan 14, 1997
Mask manufacturing method and apparatus and device manufacturing method using a mask manufactured by the method or apparatus
CANON KK52 citations93
US5585923ADec 17, 1996
Method and apparatus for measuring positional deviation while correcting an error on the basis of the error detection by an error detecting means
CANON KK29 citations93
US5461474AOct 24, 1995
Inspection apparatus for detecting foreign matter on a surface to be inspected, and an exposure apparatus and a device manufacturing method using the same
CANON KK49 citations93
US5440394AAug 8, 1995
Length-measuring device and exposure apparatus
CANON KK25 citations93
US5432603AJul 11, 1995
Optical heterodyne interference measuring apparatus and method, and exposing apparatus and device manufacturing method using the same, in which a phase difference between beat signals is detected
CANON KK36 citations93
US5369486ANov 29, 1994
Position detector for detecting the position of an object using a diffraction grating positioned at an angle
CANON KK51 citations93
US5313272AMay 17, 1994
Method and apparatus for measuring deviation between patterns on a semiconductor wafer
CANON KK20 citations93
US5262257ANov 16, 1993
Mask for lithography
CANON KK32 citations93
US5200800AApr 6, 1993
Position detecting method and apparatus
CANON KK30 citations93
US5162656ANov 10, 1992
Position detecting device employing marks and oblique projection
CANON KK34 citations93
US5116369AMay 26, 1992
Composition for intraocular lens
CANON KK31 citations93
US5033856AJul 23, 1991
Three-dimensional shape measuring apparatus
CANON KK31 citations93
US5000572AMar 19, 1991
Distance measuring system
CANON KK27 citations93
US4783153ANov 8, 1988
Variable-focus optical device
CANON KK39 citations93
US4691982ASep 8, 1987
Optical coupler
CANON KK27 citations93
US4539482ASep 3, 1985
Reading apparatus
CANON KK44 citations93
US5028797AJul 2, 1991
An alignment system for align first and second objects using alignment marks
CANON KK30 citations92
US4165930AAug 28, 1979
Camera having a holographic indicator
CANON KK22 citations82
US4523801AJun 18, 1985
Scanning optical system subjected to a moisture proof treatment
CANON KK21 citations81
US4842408AJun 27, 1989
Phase shift measuring apparatus utilizing optical meterodyne techniques
CANON KK21 citations79
US5742386AApr 21, 1998
Apparatus for detecting foreign matter on a substrate, and an exposure apparatus including the same
CANON KK14 citations74
US5495336AFeb 27, 1996
Position detecting method for detecting a positional relationship between a first object and a second object
CANON KK18 citations74
US5379108AJan 3, 1995
Alignment system
CANON KK9 citations74
US5343291AAug 30, 1994
Method and apparatus for measuring an interval between two objects
CANON KK16 citations74
US5319444AJun 7, 1994
Position detecting method and apparatus
CANON KK14 citations74
US5294980AMar 15, 1994
Positioning detecting method and apparatus
CANON KK19 citations74
US5161176ANov 3, 1992
Exposure apparatus
CANON KK8 citations74
US5122660AJun 16, 1992
Distance measuring system utilizing an object with at least one inclined surface
CANON KK19 citations74
US4912408AMar 27, 1990
Distance measuring system using superconducting quantum interference device
CANON KK8 citations74
US4840473AJun 20, 1989
Optical device
CANON KK14 citations74
US4595290AJun 17, 1986
Device for measuring light incident on an optical system
CANON KK8 citations74
US4544269AOct 1, 1985
Device for measuring light incident on an optical system
CANON KK8 citations74
US4436398AMar 13, 1984
Device for splitting part of light incident on an image forming optical system
CANON KK15 citations74
US4265522AMay 5, 1981
Camera having a holographic indicator
CANON KK8 citations74
US5557411ASep 17, 1996
Position detection method
CANON KK8 citations73
US5459573AOct 17, 1995
Light quantity controlling apparatus
CANON KK3 citations63
Showing the top 50 of 53 patents by PatentIndex Score.