Inventor
HASEGAWA MASANOBU
JP29 patents
⚠️ This page may combine multiple inventors who share the name “HASEGAWA MASANOBU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
24 patentsUS6636311B1Oct 21, 2003
Alignment method and exposure apparatus using the same
CANON KK63 citations96
US6040909AMar 21, 2000
Surface position detecting system and device manufacturing method using the same
CANON KK68 citations96
US6906805B1Jun 14, 2005
Position detecting system and exposure apparatus using the same
CANON KK16 citations93
US6266130B1Jul 24, 2001
Position detecting method and position detecting system
CANON KK28 citations93
US6157452ADec 5, 2000
Position detecting apparatus
CANON KK29 citations93
US6124601ASep 26, 2000
Position sensor having a reflective projecting system and device fabrication method using the sensor
CANON KK24 citations93
US5969820AOct 19, 1999
Surface position detecting system and exposure apparatus using the same
CANON KK47 citations93
US5834767ANov 10, 1998
Surface position detecting system and projection exposure apparatus using the same
CANON KK39 citations93
US5777744AJul 7, 1998
Exposure state detecting system and exposure apparatus using the same
CANON KK46 citations93
US5750294AMay 12, 1998
Best focus determining method
CANON KK30 citations93
US5369486ANov 29, 1994
Position detector for detecting the position of an object using a diffraction grating positioned at an angle
CANON KK51 citations93
US5313272AMay 17, 1994
Method and apparatus for measuring deviation between patterns on a semiconductor wafer
CANON KK20 citations93
US5726758AMar 10, 1998
Position detecting system
CANON KK17 citations84
US5717492AFeb 10, 1998
Position detecting apparatus and a method for manufacturing semiconductor devices using the apparatus
CANON KK17 citations84
US7352475B2Apr 1, 2008
Measuring method and apparatus using shearing interferometry, exposure method and apparatus using the same, and device manufacturing method
CANON KK8 citations74
US5495336AFeb 27, 1996
Position detecting method for detecting a positional relationship between a first object and a second object
CANON KK18 citations74
US5396335AMar 7, 1995
Position detecting method
CANON KK18 citations74
US5343291AAug 30, 1994
Method and apparatus for measuring an interval between two objects
CANON KK16 citations74
US5291023AMar 1, 1994
Position detecting system utilizing a weight coefficient to determine a gravity center of light
CANON KK16 citations74
US5523844AJun 4, 1996
Displacement detection apparatus
CANON KK15 citations73
US6529263B2Mar 4, 2003
Position detection apparatus having a plurality of detection sections, and exposure apparatus
CANON KK9 citations70
US7295326B2Nov 13, 2007
Apparatus and method for measuring the optical performance of an optical element
CANON KK2 citations63
US6972847B2Dec 6, 2005
Position detecting system and exposure apparatus using the same
CANON KK3 citations63
US7072023B2Jul 4, 2006
Position detection apparatus having a plurality of detection sections, and exposure apparatus
CANON KK0 citations48