P

Inventor

YONEDA MASAHIRO

JP21 patents
⚠️ This page may combine multiple inventors who share the name “YONEDA MASAHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MITSUBISHI ELECTRIC CORP

16 patents
US4465529AAug 14, 1984

Method of producing semiconductor device

MITSUBISHI ELECTRIC CORP81 citations96
US4430547AFeb 7, 1984

Cleaning device for a plasma etching system

MITSUBISHI ELECTRIC CORP63 citations96
US5277740AJan 11, 1994

Apparatus and method for forming a fine pattern

MITSUBISHI ELECTRIC CORP20 citations92
US5258266ANov 2, 1993

Method of forming minute patterns using positive chemically amplifying type resist

MITSUBISHI ELECTRIC CORP33 citations92
US5175118ADec 29, 1992

Multiple layer electrode structure for semiconductor device and method of manufacturing thereof

MITSUBISHI ELECTRIC CORP50 citations92
US5079617AJan 7, 1992

Multiple layer electrode structure for semiconductor device and method of manufacturing thereof

MITSUBISHI ELECTRIC CORP26 citations92
US5177574AJan 5, 1993

Semiconductor memory device having a stacked type capacitor and manufacturing method therefor

MITSUBISHI ELECTRIC CORP17 citations82
US5158861AOct 27, 1992

Method of forming minute patterns using chemically amplifying type resist

MITSUBISHI ELECTRIC CORP21 citations81
US4956692ASep 11, 1990

Semiconductor device having an isolation oxide film

MITSUBISHI ELECTRIC CORP11 citations74
US5292401AMar 8, 1994

Method of forming a fine pattern

MITSUBISHI ELECTRIC CORP5 citations73
US5285092AFeb 8, 1994

Semiconductor memory device having a stacked type capacitor and manufacturing method therefor

MITSUBISHI ELECTRIC CORP9 citations73
US5228940AJul 20, 1993

Fine pattern forming apparatus

MITSUBISHI ELECTRIC CORP5 citations73
US4929990AMay 29, 1990

Semiconductor memory device

MITSUBISHI ELECTRIC CORP7 citations73
US5219781AJun 15, 1993

Method for manufacturing semiconductor memory device having a stacked type capacitor

MITSUBISHI ELECTRIC CORP4 citations62
US4984199AJan 8, 1991

Semiconductor memory cells having common contact hole

MITSUBISHI ELECTRIC CORP3 citations62
US4887137ADec 12, 1989

Semiconductor memory device

MITSUBISHI ELECTRIC CORP1 citations51

NICHIA KAGAKU KOGYO KK

2 patents

OMRON TATEISI ELECTRONICS CO

1 patent

KAWADA KOGYO KK

1 patent

KEPPENS WILLEM STEVEN PAUL

1 patent