Inventor
MORIIZUMI KOICHI
JP14 patents
⚠️ This page may combine multiple inventors who share the name “MORIIZUMI KOICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI ELECTRIC CORP
13 patentsUS6343370B1Jan 29, 2002
Apparatus and process for pattern distortion detection for semiconductor process and semiconductor device manufactured by use of the apparatus or process
MITSUBISHI ELECTRIC CORP84 citations97
US6069971AMay 30, 2000
Pattern comparison inspection system and method employing gray level bit map
MITSUBISHI ELECTRIC CORP65 citations95
US6298473B1Oct 2, 2001
Apparatus and method for inhibiting pattern distortions to correct pattern data in a semiconductor device
MITSUBISHI ELECTRIC CORP69 citations94
US4794646ADec 27, 1988
Charged beam pattern defect inspection apparatus
MITSUBISHI ELECTRIC CORP31 citations92
US6088520AJul 11, 2000
Method of producing highly precise charged beam drawing data divided into plurality of drawing fields
MITSUBISHI ELECTRIC CORP25 citations91
US5812412ASep 22, 1998
Charged beam pattern data generating method and a charged beam pattern data generating apparatus
MITSUBISHI ELECTRIC CORP24 citations90
US6271852B1Aug 7, 2001
boundary processing of oblique overlapping graphics to achieve dimensionally accurate electron beam irradiation
MITSUBISHI ELECTRIC CORP19 citations82
US5153441AOct 6, 1992
Electron-beam exposure apparatus
MITSUBISHI ELECTRIC CORP13 citations73
US5086398AFeb 4, 1992
Electron beam exposure method
MITSUBISHI ELECTRIC CORP17 citations73
US5008830AApr 16, 1991
Method of preparing drawing data for charged beam exposure system
MITSUBISHI ELECTRIC CORP17 citations73
US4984199AJan 8, 1991
Semiconductor memory cells having common contact hole
MITSUBISHI ELECTRIC CORP3 citations62
US5796408AAug 18, 1998
Charged particle beam drawing data production apparatus and charged particle beam drawing system
MITSUBISHI ELECTRIC CORP3 citations61
US4887137ADec 12, 1989
Semiconductor memory device
MITSUBISHI ELECTRIC CORP1 citations51