Inventor
EHRLICH DANIEL J
US25 patents
⚠️ This page may combine multiple inventors who share the name “EHRLICH DANIEL J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MASSACHUSETTS INST TECHNOLOGY
18 patentsUS5846708ADec 8, 1998
Optical and electrical methods and apparatus for molecule detection
MASSACHUSETTS INST TECHNOLOGY749 citations97
US5653939AAug 5, 1997
Optical and electrical methods and apparatus for molecule detection
MASSACHUSETTS INST TECHNOLOGY930 citations97
US5310624AMay 10, 1994
Integrated circuit micro-fabrication using dry lithographic processes
MASSACHUSETTS INST TECHNOLOGY95 citations96
US4868005ASep 19, 1989
Method and apparatus for photodeposition of films on surfaces
MASSACHUSETTS INST TECHNOLOGY67 citations94
US4615904AOct 7, 1986
Maskless growth of patterned films
MASSACHUSETTS INST TECHNOLOGY53 citations94
US4340617AJul 20, 1982
Method and apparatus for depositing a material on a surface
MASSACHUSETTS INST TECHNOLOGY133 citations94
US5002899AMar 26, 1991
Electrical contacts on diamond
MASSACHUSETTS INST TECHNOLOGY34 citations92
US4888203ADec 19, 1989
Hydrolysis-induced vapor deposition of oxide films
MASSACHUSETTS INST TECHNOLOGY24 citations92
US4672254AJun 9, 1987
Surface acoustic wave devices and method of manufacture thereof
MASSACHUSETTS INST TECHNOLOGY124 citations92
US4834834AMay 30, 1989
Laser photochemical etching using surface halogenation
MASSACHUSETTS INST TECHNOLOGY48 citations91
US5032543AJul 16, 1991
Coplanar packaging techniques for multichip circuits
MASSACHUSETTS INST TECHNOLOGY62 citations90
US4608117AAug 26, 1986
Maskless growth of patterned films
MASSACHUSETTS INST TECHNOLOGY42 citations90
US4756927AJul 12, 1988
Method and apparatus for refractory metal deposition
MASSACHUSETTS INST TECHNOLOGY21 citations81
US4619894AOct 28, 1986
Solid-transformation thermal resist
MASSACHUSETTS INST TECHNOLOGY25 citations81
US4957775ASep 18, 1990
Method and apparatus for refractory metal deposition
MASSACHUSETTS INST TECHNOLOGY17 citations73
US4748045AMay 31, 1988
Method and apparatus for photodeposition of films on surfaces
MASSACHUSETTS INST TECHNOLOGY12 citations72
US4668528AMay 26, 1987
Method and apparatus for photodeposition of films on surfaces
MASSACHUSETTS INST TECHNOLOGY11 citations68
US5198881AMar 30, 1993
Barrier layer device processing
MASSACHUSETTS INST TECHNOLOGY4 citations62
HOUSTON ADVANCED RES CENTER
3 patentsWHITEHEAD BIOMEDICAL INST
2 patentsUS6207031B1Mar 27, 2001
Methods and apparatus for processing a sample of biomolecular analyte using a microfabricated device
WHITEHEAD BIOMEDICAL INST227 citations96
US6991713B2Jan 31, 2006
Methods and apparatus for processing a sample of biomolecular analyte using a microfabricated device
WHITEHEAD BIOMEDICAL INST26 citations90