P

Inventor

EHRLICH DANIEL J

US25 patents
⚠️ This page may combine multiple inventors who share the name “EHRLICH DANIEL J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MASSACHUSETTS INST TECHNOLOGY

18 patents
US5846708ADec 8, 1998

Optical and electrical methods and apparatus for molecule detection

MASSACHUSETTS INST TECHNOLOGY749 citations97
US5653939AAug 5, 1997

Optical and electrical methods and apparatus for molecule detection

MASSACHUSETTS INST TECHNOLOGY930 citations97
US5310624AMay 10, 1994

Integrated circuit micro-fabrication using dry lithographic processes

MASSACHUSETTS INST TECHNOLOGY95 citations96
US4868005ASep 19, 1989

Method and apparatus for photodeposition of films on surfaces

MASSACHUSETTS INST TECHNOLOGY67 citations94
US4615904AOct 7, 1986

Maskless growth of patterned films

MASSACHUSETTS INST TECHNOLOGY53 citations94
US4340617AJul 20, 1982

Method and apparatus for depositing a material on a surface

MASSACHUSETTS INST TECHNOLOGY133 citations94
US5002899AMar 26, 1991

Electrical contacts on diamond

MASSACHUSETTS INST TECHNOLOGY34 citations92
US4888203ADec 19, 1989

Hydrolysis-induced vapor deposition of oxide films

MASSACHUSETTS INST TECHNOLOGY24 citations92
US4672254AJun 9, 1987

Surface acoustic wave devices and method of manufacture thereof

MASSACHUSETTS INST TECHNOLOGY124 citations92
US4834834AMay 30, 1989

Laser photochemical etching using surface halogenation

MASSACHUSETTS INST TECHNOLOGY48 citations91
US5032543AJul 16, 1991

Coplanar packaging techniques for multichip circuits

MASSACHUSETTS INST TECHNOLOGY62 citations90
US4608117AAug 26, 1986

Maskless growth of patterned films

MASSACHUSETTS INST TECHNOLOGY42 citations90
US4756927AJul 12, 1988

Method and apparatus for refractory metal deposition

MASSACHUSETTS INST TECHNOLOGY21 citations81
US4619894AOct 28, 1986

Solid-transformation thermal resist

MASSACHUSETTS INST TECHNOLOGY25 citations81
US4957775ASep 18, 1990

Method and apparatus for refractory metal deposition

MASSACHUSETTS INST TECHNOLOGY17 citations73
US4748045AMay 31, 1988

Method and apparatus for photodeposition of films on surfaces

MASSACHUSETTS INST TECHNOLOGY12 citations72
US4668528AMay 26, 1987

Method and apparatus for photodeposition of films on surfaces

MASSACHUSETTS INST TECHNOLOGY11 citations68
US5198881AMar 30, 1993

Barrier layer device processing

MASSACHUSETTS INST TECHNOLOGY4 citations62

HOUSTON ADVANCED RES CENTER

3 patents

WHITEHEAD BIOMEDICAL INST

2 patents

EHRLICH DANIEL J

1 patent

ROTHSCHILD MORDECHAI

1 patent