Inventor
NAGOYA TAKATOSHI
JP13 patents
⚠️ This page may combine multiple inventors who share the name “NAGOYA TAKATOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHINETSU HANDOTAI KK
12 patentsUS5156982AOct 20, 1992
Pattern shift measuring method
SHINETSU HANDOTAI KK53 citations94
US5487358AJan 30, 1996
Apparatus for growing silicon epitaxial layer
SHINETSU HANDOTAI KK27 citations92
US5421288AJun 6, 1995
Process for growing silicon epitaxial layer
SHINETSU HANDOTAI KK25 citations92
US7189293B2Mar 13, 2007
Method of producing annealed wafer and annealed wafer
SHINETSU HANDOTAI KK7 citations73
US6841450B2Jan 11, 2005
Annealed wafer manufacturing method and annealed wafer
SHINETSU HANDOTAI KK3 citations62
US6805743B2Oct 19, 2004
Method for manufacturing single-crystal-silicon wafers
SHINETSU HANDOTAI KK4 citations62
US7153785B2Dec 26, 2006
Method of producing annealed wafer and annealed wafer
SHINETSU HANDOTAI KK5 citations61
US5172188ADec 15, 1992
Pattern shift measuring method
SHINETSU HANDOTAI KK4 citations61
US6670261B2Dec 30, 2003
Production method for annealed wafer
SHINETSU HANDOTAI KK1 citations52
US7622312B2Nov 24, 2009
Method for evaluating dopant contamination of semiconductor wafer
SHINETSU HANDOTAI KK0 citations51
US5685905ANov 11, 1997
Method of manufacturing a single crystal thin film
SHINETSU HANDOTAI KK0 citations50
US7659216B2Feb 9, 2010
Method for producing annealed wafer and annealed wafer
SHINETSU HANDOTAI KK0 citations40