Inventor
ISHIYAMA TOSHIRO
JP9 patents
Patents
9 patentsUS5668673ASep 16, 1997
Catadioptric reduction projection optical system
NIKON CORP62 citations96
US5694241ADec 2, 1997
Catadioptric reduction projection optical system and exposure apparatus employing the same
NIKON CORP92 citations95
US5592329AJan 7, 1997
Catadioptric optical system
NIKON CORP74 citations95
US5321554AJun 14, 1994
Inverse telescopic wide angle lens
NIKON CORP28 citations92
US5771125AJun 23, 1998
Catadioptric system for photolithography
NIKON CORP17 citations82
US5477388ADec 19, 1995
Inverse telescopic wide angle lens
NIKON CORP14 citations73
US5321553AJun 14, 1994
Zoom lens
NIKON CORP11 citations73
US5434425AJul 18, 1995
Optical position detecting apparatus
NIKON CORP6 citations61
US7154585B2Dec 26, 2006
Projection optical system, exposure apparatus, and device production method
NIKON CORP0 citations50