Inventor
COYLE KEVIN W
US7 patents
⚠️ This page may combine multiple inventors who share the name “COYLE KEVIN W”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEMITOOL INC
6 patentsUS6203582B1Mar 20, 2001
Modular semiconductor workpiece processing tool
SEMITOOL INC154 citations98
US6672820B1Jan 6, 2004
Semiconductor processing apparatus having linear conveyer system
SEMITOOL INC145 citations97
US6440178B2Aug 27, 2002
Modular semiconductor workpiece processing tool
SEMITOOL INC82 citations97
US6004440ADec 21, 1999
Cathode current control system for a wafer electroplating apparatus
SEMITOOL INC117 citations96
US6139703AOct 31, 2000
Cathode current control system for a wafer electroplating apparatus
SEMITOOL INC67 citations94
US7074246B2Jul 11, 2006
Modular semiconductor workpiece processing tool
SEMITOOL INC8 citations73