Inventor
MCKERNAN MARK A
US6 patents
Patents
6 patentsUS5392981AFeb 28, 1995
Fabrication of boron sputter targets
UNIV CALIFORNIA33 citations92
US5286361AFeb 15, 1994
Magnetically attached sputter targets
UNIV CALIFORNIA27 citations92
US5284539AFeb 8, 1994
Method of making segmented pyrolytic graphite sputtering targets
UNIV CALIFORNIA38 citations91
US6149785ANov 21, 2000
Apparatus for coating powders
UNIV CALIFORNIA39 citations90
US5333726AAug 2, 1994
Magnetron sputtering source
UNIV CALIFORNIA30 citations87
US6355146B1Mar 12, 2002
Sputtering process and apparatus for coating powders
UNIV CALIFORNIA9 citations71