Inventor
WILLMANN MARTIN
DE8 patents
Patents
8 patentsUS5273939ADec 28, 1993
Method of assembling micromechanical sensors
BOSCH GMBH ROBERT71 citations95
US5216273AJun 1, 1993
Microvalve of multilayer silicon construction
BOSCH GMBH ROBERT103 citations95
US5542558AAug 6, 1996
Method for manufacturing micro-mechanical components using selective anodization of silicon
BOSCH GMBH ROBERT36 citations92
US5461917AOct 31, 1995
Acceleration sensor
BOSCH GMBH ROBERT23 citations92
US5310450AMay 10, 1994
Method of making an acceleration sensor
BOSCH GMBH ROBERT34 citations92
US5324410AJun 28, 1994
Device for one-sided etching of a semiconductor wafer
BOSCH GMBH ROBERT51 citations90
US5355569AOct 18, 1994
Method of making sensor
BOSCH GMBH ROBERT16 citations73
US6101872AAug 15, 2000
Sensor having a thin film element
BOSCH GMBH ROBERT5 citations60