Inventor
BANTIEN FRANK
DE12 patents
Patents
12 patentsUS5259247ANov 9, 1993
Sensor
BOSCH GMBH ROBERT129 citations97
US5616523AApr 1, 1997
Method of manufacturing sensor
BOSCH GMBH ROBERT59 citations96
US5600074AFeb 4, 1997
Silicon chip for use in a force-detection sensor
BOSCH GMBH ROBERT64 citations96
US5569852AOct 29, 1996
Capacitive accelerometer sensor and method for its manufacture
BOSCH GMBH ROBERT55 citations96
US5151763ASep 29, 1992
Acceleration and vibration sensor and method of making the same
BOSCH GMBH ROBERT173 citations96
US5273939ADec 28, 1993
Method of assembling micromechanical sensors
BOSCH GMBH ROBERT71 citations95
US5542558AAug 6, 1996
Method for manufacturing micro-mechanical components using selective anodization of silicon
BOSCH GMBH ROBERT36 citations92
US5452610ASep 26, 1995
Mass-flow sensor
BOSCH GMBH ROBERT35 citations92
US5446437AAug 29, 1995
Temperature sensor
BOSCH GMBH ROBERT44 citations92
US5148604ASep 22, 1992
Micromechanical tilt sensor
BOSCH GMBH ROBERT51 citations92
US5261639ANov 16, 1993
Valve
BOSCH GMBH ROBERT9 citations73
US5467649ANov 21, 1995
Mass flow sensor having a measuring element arranged on a membrane retained on a monocrystalline silicon wafer
BOSCH GMBH ROBERT4 citations62