Inventor

OFFENBERG MICHAEL

DE37 patents

⚠️ This page may combine multiple inventors who share the name “OFFENBERG MICHAEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

OFFENBERG MICHAEL

BOSCH GMBH ROBERT

Process for producing surface micromechanical structures

Accelerometer sensor of crystalline material and method for manufacturing the same

Sensor and method for manufacturing a sensor

Process for manufacturing a sensor

Method of fabricating a micromechanical sensor

Process for producing a speed of rotation coriolis sensor

Acceleration sensor

Method of manufacturing sensor

Acceleration sensor

Capacitive accelerometer sensor and method for its manufacture

Micromechanical sensor and method for the manufacture thereof

Acceleration sensor

Method of producing acceleration sensors

Sensor comprising multilayer substrate

Micromechanical component having closely spaced apart anchoring areas for a surface structure disposed thereon

Manufacturing method for micromechanical component

Bonding pad structure and method for manufacturing the bonding pad structure

Method for manufacturing a rate-of-rotation sensor

Micromechanical sensor including a single-crystal silicon support

Method for manufacturing a sensor

Suspension for micromechanical structure and micromechanical acceleration sensor

Method for manufacturing micro-mechanical components using selective anodization of silicon

Acceleration sensor

Mass-flow sensor

Method of making an acceleration sensor

Sensor with at least one micromechanical structure and method for production thereof

Method for manufacturing a micromechanical component

Micromechanical component and corresponding production method

Method of manufacturing micromechanical surface structures by vapor-phase etching

Method of making sensor

Sensor with at least one micromechanical structure, and method for producing it

Method for fabricating a micromechanical component

Method for manufacturing an accelerometer sensor of crystalline material

Mass flow sensor having a measuring element arranged on a membrane retained on a monocrystalline silicon wafer

Method for fabricating micromechanical components

GMBH ROBERT BOSCH

Acceleration sensor

OFFENBERG MICHAEL

Micromechanical sensor element, method for manufacturing a micromechanical sensor element and method for operating a micromechanical sensor element