Inventor
SCHERTLER ROMAN
AT29 patents
⚠️ This page may combine multiple inventors who share the name “SCHERTLER ROMAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BALZERS HOCHVAKUUM
14 patentsUS6096231AAug 1, 2000
Chamber, at least for the transport of workpieces, a chamber combination, a vacuum treatment facility as well as a transport method
BALZERS HOCHVAKUUM19 citations92
US5590994AJan 7, 1997
Chamber, at least for the transport of workpieces, a chamber combination, a vacuum treatment facility as well as a transport method
BALZERS HOCHVAKUUM18 citations92
US5911861AJun 15, 1999
Coating station
BALZERS HOCHVAKUUM20 citations91
US5490913AFeb 13, 1996
Magnetic field enhanced sputtering arrangement with vacuum treatment apparatus
BALZERS HOCHVAKUUM31 citations90
US5882171AMar 16, 1999
Transport and transfer apparatus
BALZERS HOCHVAKUUM20 citations89
US5415729AMay 16, 1995
Vacuum treatment apparatus
BALZERS HOCHVAKUUM32 citations86
US5662785ASep 2, 1997
Method for masking a workpiece and a vacuum treatment facility
BALZERS HOCHVAKUUM19 citations84
US5245736ASep 21, 1993
Vacuum process apparatus
BALZERS HOCHVAKUUM15 citations82
US5549435AAug 27, 1996
Chamber and a chamber combination for a vacuum facility and a method for transporting through at least one workpiece
BALZERS HOCHVAKUUM11 citations74
US5391231AFeb 21, 1995
Holding arrangement for a planar workpiece and at least one such holding arrangement
BALZERS HOCHVAKUUM7 citations74
US6123814ASep 26, 2000
Coating station
BALZERS HOCHVAKUUM6 citations72
US5571331ANov 5, 1996
Vacuum treatment apparatus
BALZERS HOCHVAKUUM18 citations72
US5865588AFeb 2, 1999
Chamber, at least for the transport of workpieces, a chamber combination, a vacuum treatment facility as well as a transport method
BALZERS HOCHVAKUUM2 citations63
US5017073AMay 21, 1991
Transport system for conveying workpiece between first and second media
BALZERS HOCHVAKUUM4 citations57
UNAXIS BALZERS AG
9 patentsUS6899795B1May 31, 2005
Sputter chamber as well as vacuum transport chamber and vacuum handling apparatus with such chambers
UNAXIS BALZERS AG34 citations92
US6730194B2May 4, 2004
Method for manufacturing disk-shaped workpieces with a sputter station
UNAXIS BALZERS AG21 citations92
US6453543B1Sep 24, 2002
Transport and transfer device
UNAXIS BALZERS AG21 citations89
US6818108B2Nov 16, 2004
Chamber for the transport of workpieces in a vacuum atmosphere, a chamber combination and a method for transporting a workpiece
UNAXIS BALZERS AG10 citations74
US6364955B2Apr 2, 2002
Chamber, at least for the transport of workpieces, a chamber combination, a vacuum treatment facility as well as a transport method
UNAXIS BALZERS AG4 citations74
US6325856B1Dec 4, 2001
Vacuum treatment equipment
UNAXIS BALZERS AG11 citations74
US6481955B2Nov 19, 2002
Vacuum treatment equipment
UNAXIS BALZERS AG3 citations63
US6416640B1Jul 9, 2002
Sputter station
UNAXIS BALZERS AG6 citations63
US7033471B2Apr 25, 2006
Sputter chamber as well as vacuum transport chamber and vacuum handling apparatus with such chambers
UNAXIS BALZERS AG0 citations51