Inventor
SATO MITSUYA
JP31 patents
⚠️ This page may combine multiple inventors who share the name “SATO MITSUYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
25 patentsUS4864227ASep 5, 1989
Wafer prober
CANON KK152 citations99
US4929893AMay 29, 1990
Wafer prober
CANON KK206 citations98
US4789294ADec 6, 1988
Wafer handling apparatus and method
CANON KK593 citations98
US7009683B2Mar 7, 2006
Exposure apparatus
CANON KK61 citations96
US5608492AMar 4, 1997
Scanning type exposure apparatus and method and device manufacturing method
CANON KK53 citations96
US4755747AJul 5, 1988
Wafer prober and a probe card to be used therewith
CANON KK123 citations96
US4677474AJun 30, 1987
Wafer prober
CANON KK92 citations95
US6369876B1Apr 9, 2002
Exposure apparatus and method, device manufacturing method, and discharge lamp
CANON KK15 citations92
US5753926AMay 19, 1998
Scan type exposure apparatus and method having a reference plate with marks for image detection
CANON KK24 citations92
US4934064AJun 19, 1990
Alignment method in a wafer prober
CANON KK46 citations92
US4496239AJan 29, 1985
Projection exposure apparatus
CANON KK46 citations92
US4747608AMay 31, 1988
Wafer chuck
CANON KK33 citations91
US4870288ASep 26, 1989
Alignment method
CANON KK29 citations90
US7898119B2Mar 1, 2011
Planar motor and stage using the same
CANON KK9 citations84
US6166505ADec 26, 2000
Interlocking apparatus
CANON KK16 citations84
US4569562AFeb 11, 1986
Method of and apparatus for controlling a fluid bearing
CANON KK19 citations82
US4659227AApr 21, 1987
Alignment apparatus
CANON KK21 citations81
US7245349B2Jul 17, 2007
Exposure apparatus
CANON KK8 citations74
US6888618B2May 3, 2005
Exposure apparatus and exposure method
CANON KK8 citations74
US6862079B2Mar 1, 2005
Light source, light source generation control method, exposure apparatus and maintenance method therefor, and semiconductor device manufacturing method and semiconductor production facility
CANON KK10 citations74
US6771353B2Aug 3, 2004
Exposure apparatus and method, device manufacturing method, and discharge lamp
CANON KK11 citations74
US7551264B2Jun 23, 2009
Exposure apparatus
CANON KK1 citations63
US7079222B2Jul 18, 2006
Exposure apparatus
CANON KK3 citations63
US7050153B2May 23, 2006
Exposure apparatus
CANON KK0 citations52
US7772727B2Aug 10, 2010
Planar pulse motor, exposure apparatus, and device manufacturing method
CANON KK0 citations42
HITACHI LTD
4 patentsUS3969637AJul 13, 1976
Transistor circuit
HITACHI LTD10 citations74
US4543499ASep 24, 1985
I2 L circuitry having operating current supplied by higher-voltage circuitry fabricated on same chip
HITACHI LTD10 citations73
US3961360AJun 1, 1976
Synchronizing detector circuit
HITACHI LTD7 citations70
US4276560AJun 30, 1981
Color signal reproducing system and circuit for the same
HITACHI LTD4 citations62