Inventor
KOMATSU FUMIO
JP26 patents
⚠️ This page may combine multiple inventors who share the name “KOMATSU FUMIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA KK
25 patentsUS5887080AMar 23, 1999
Method and apparatus for processing pattern image data by SEM
TOSHIBA KK102 citations96
US5359197AOct 25, 1994
Apparatus and method of aligning electron beam of scanning electron microscope
TOSHIBA KK79 citations96
US4807159AFeb 21, 1989
Apparatus and method for controlling irradiation of an electron beam at a fixed position in an electron beam tester system
TOSHIBA KK72 citations96
US6515296B1Feb 4, 2003
Pattern dimension measuring system and pattern dimension measuring method
TOSHIBA KK34 citations93
US5029250AJul 2, 1991
Pattern configuration measuring apparatus
TOSHIBA KK27 citations93
US4910398AMar 20, 1990
Pattern Measurement method
TOSHIBA KK33 citations93
US6363167B1Mar 26, 2002
Method for measuring size of fine pattern
TOSHIBA KK32 citations92
US6114681ASep 5, 2000
Automatic focus control method and automatic focus control system having in focus and out of focus states detection
TOSHIBA KK25 citations92
US5497407AMar 5, 1996
Contaminating-element analyzing method
TOSHIBA KK28 citations92
US5479535ADec 26, 1995
Method of extracting features of image
TOSHIBA KK46 citations92
US5430786AJul 4, 1995
Element analyzing method
TOSHIBA KK22 citations92
US5247588ASep 21, 1993
Method of image restoration
TOSHIBA KK24 citations92
US5161201ANov 3, 1992
Method of and apparatus for measuring pattern profile
TOSHIBA KK37 citations92
US4894540AJan 16, 1990
Image forming method using secondary electrons from object for noise elimination
TOSHIBA KK26 citations92
US6111981AAug 29, 2000
Method and apparatus for processing pattern image data by SEM
TOSHIBA KK29 citations91
US5811803ASep 22, 1998
Electron microscope
TOSHIBA KK47 citations91
US5555319ASep 10, 1996
Critical dimension measuring method and equipment thereof
TOSHIBA KK22 citations91
US5159643AOct 27, 1992
Method and apparatus for measuring pattern dimension
TOSHIBA KK21 citations81
US6187488B1Feb 13, 2001
Pattern estimating method and pattern forming method
TOSHIBA KK13 citations74
US5315119AMay 24, 1994
Electron beam irradiating apparatus and electric signal detecting apparatus
TOSHIBA KK14 citations74
US5490194AFeb 6, 1996
Method and apparatus for analyzing contaminative element concentrations
TOSHIBA KK7 citations73
US5422925AJun 6, 1995
Contaminating-element analyzing method and apparatus of the same
TOSHIBA KK12 citations73
US5302829AApr 12, 1994
Automatic focusing method for scanning electron microscopy
TOSHIBA KK14 citations72
US5818217AOct 6, 1998
Electron beam irradiating apparatus and electric signal detecting apparatus
TOSHIBA KK3 citations63
US5528648AJun 18, 1996
Method and apparatus for analyzing contaminative element concentrations
TOSHIBA KK5 citations62