Inventor
NAGAO MIE
JP3 patents
Patents
3 patentsUS6252758B1Jun 26, 2001
Method for reducing particles from an electrostatic chuck and an equipment for manufacturing a semiconductor
NGK INSULATORS LTD23 citations91
US6975497B2Dec 13, 2005
Method for reducing particles from an electrostatic chuck and an equipment for manufacturing a semiconductor
NGK INSULATORS LTD9 citations72
US6549392B1Apr 15, 2003
Method for reducing particles from an electrostatic chuck and an equipment for manufacturing a semiconductor
NGK INSULATORS LTD11 citations72