Inventor
MITSUI SOICHIRO
JP7 patents
⚠️ This page may combine multiple inventors who share the name “MITSUI SOICHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA KK
6 patentsUS6078641AJun 20, 2000
X-ray lithography system and x-ray lithography method
TOSHIBA KK22 citations91
US7075621B2Jul 11, 2006
Alignment method
TOSHIBA KK8 citations72
US6901314B2May 31, 2005
Alignment apparatus for substrates
TOSHIBA KK10 citations72
US7704645B2Apr 27, 2010
Method of generating writing pattern data of mask and method of writing mask
TOSHIBA KK7 citations71
US7495248B2Feb 24, 2009
Position detecting apparatus and position detecting method
TOSHIBA KK5 citations61
US7491959B2Feb 17, 2009
Defect inspection apparatus
TOSHIBA KK2 citations61