P

Inventor

HAYASHI SHINICHI

JP179 patents
⚠️ This page may combine multiple inventors who share the name “HAYASHI SHINICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

19 patents
US7591601B2Sep 22, 2009

Coater/developer, coating/developing method, and storage medium

TOKYO ELECTRON LTD464 citations99
US6752872B2Jun 22, 2004

Coating unit and coating method

TOKYO ELECTRON LTD50 citations96
US6672779B2Jan 6, 2004

Substrate processing apparatus and substrate processing method

TOKYO ELECTRON LTD51 citations96
US6471422B2Oct 29, 2002

Substrate processing apparatus and substrate processing method

TOKYO ELECTRON LTD63 citations96
US6402401B1Jun 11, 2002

Substrate processing apparatus and substrate processing method

TOKYO ELECTRON LTD49 citations96
US7322756B2Jan 29, 2008

Coating and developing apparatus and coating and developing method

TOKYO ELECTRON LTD33 citations93
US7281869B2Oct 16, 2007

Coating and developing system and coating and developing method

TOKYO ELECTRON LTD30 citations93
US7267497B2Sep 11, 2007

Coating and developing system and coating and developing method

TOKYO ELECTRON LTD29 citations93
US7241061B2Jul 10, 2007

Coating and developing system and coating and developing method

TOKYO ELECTRON LTD34 citations93
US7797855B2Sep 21, 2010

Heating apparatus, and coating and developing apparatus

TOKYO ELECTRON LTD30 citations92
US7780438B2Aug 24, 2010

Substrate heating apparatus and method and coating and developing system

TOKYO ELECTRON LTD20 citations92
US7474377B2Jan 6, 2009

Coating and developing system

TOKYO ELECTRON LTD23 citations92
US6350316B1Feb 26, 2002

Apparatus for forming coating film

TOKYO ELECTRON LTD25 citations92
US6790283B2Sep 14, 2004

Coating apparatus

TOKYO ELECTRON LTD18 citations91
US7871211B2Jan 18, 2011

Coating and developing system, coating and developing method and storage medium

TOKYO ELECTRON LTD15 citations84
US7841072B2Nov 30, 2010

Apparatus and method of application and development

TOKYO ELECTRON LTD12 citations84
US7287920B2Oct 30, 2007

Semiconductor manufacturing apparatus and method

TOKYO ELECTRON LTD15 citations84
US7245348B2Jul 17, 2007

Coating and developing system and coating and developing method with antireflection film and an auxiliary block for inspection and cleaning

TOKYO ELECTRON LTD18 citations84
US6982102B2Jan 3, 2006

Coating unit and coating method

TOKYO ELECTRON LTD15 citations84

CANON KK

7 patents

OLYMPUS OPTICAL CO

6 patents

HAYASHI SHINICHI

4 patents

FUJITSU TEN LTD

3 patents

OLYMPUS CORP

2 patents

NGK SPARK PLUG CO

2 patents

FUJITSU LTD

1 patent

SEKIYAMA HIROAKI

1 patent

KATO TAKESHI

1 patent

DENSO CORP

1 patent

TSUBAKIMOTO CHAIN CO

1 patent

TSUCHIYAMA MASASHI

1 patent

KYOCERA CORP

1 patent

Showing the top 50 of 179 patents by PatentIndex Score.